ICSPI, Inc. is a company based in Kitchener, Canada and stands for Integrated Circuit Scanning Probe Instruments. ICSPI’s idea was to use MEMS technology to develop an AFM which is fully integrated on a single MEMS chip. After nearly 10 years of research and development at the University of Waterloo, Canada, with funding from DARPA and the Ontario Research Fund, ICSPI commercialized the world’s first single-chip atomic force microscope (AFM).
In the meantime, there are different products available which are all based on the nGauge Atomic Force Microscope.
