ULVAC-PHI a Japanese based company, is the world’s leading supplier of UHV surface analysis instrumentation. The history of PHI (Ulvac-PHI and Physical Electronics, Inc.) is going back to 1969 and was formed as a spin-off from the University of Minnesota. The first product was an Auger Electron Spectrometer but very soon PHI turned into a surface analysis equipment supplier with products in XPS, AES and Tof-SIMS. In 2003 ULVAC-PHI purchased Physical Electronics and introduced a number of innovative products since then.
The latest product release was the introduction of the PHI Genesis XPS System in July 2022.