PHI 710 Scanning Auger Nanoprobe
A scanning Auger instrument optimized for high magnification chemical imaging
The PHI 710 Scanning Auger Nanoprobe is a one-of-a-kind, high-performance Auger Electron Spectroscopy (AES) instrument that provides elemental and chemical state information from sample surfaces, nano-scale features, thin films, and interfaces. The PHI 710, designed as a high-performance Auger, offers superior Auger imaging performance, spatial resolution, sensitivity, and spectral energy resolution to address your most demanding AES applications.
Auger Electron Spectroscopy (AES) extracts quantitative elemental and chemical state information from solid material surfaces. An AES measurement’s average depth of analysis is about 5 nm. Physical Electronics Auger instruments can generate spectra with lateral spatial resolutions as low as 8 nm. Scanning the micro focused electron beam across the spatial distribution information is obtained.
Microstructure Analysis on Real World Samples
With Auger Electron Spectroscopy, PHI’s coaxial electron gun and analyzer geometry provides the sensitivity and unobstructed vision required to fully characterize the microstructures that exist on most real-world samples.
Nanoscale Thin Film Analysis
The PHI 710 provides state of the art nanoscale thin film depth analysis via several enabling technologies.
Superior Auger Imaging
A superior environment for nano-scale Auger imaging and analysis is provided by high performance electron optics, precision sample handling, and advanced vibration and thermal isolation.