A unique AFM-in-SEM tool for multimodal in-situ correlative sample analysis


The Nenovision LiteScope™ is a compact Atomic Force Microscope designed for easy integration into Scanning Electron Microscopes.

Merging the strengths of AFM and SEM gives you the best of the two leading imaging techniques. It opens the door to completely new possibilities in the field of in-situ complex sample analysis. Successful applications have been a proof of the LiteScope™ in the fields of Material Science, Semiconductors, Life Science and Nanostructures.

CPEM which stands for Correlative Probe and Electron Microscopy allows the simultaneous detection and acquisition of signals from the LiteScope™ and the SEM. During scanning, the SEM electron beam points close to the AFM tip with a constant offset. They both remain static, while the sample is moving thanks to the LiteScope’s piezo scanner. This way, data from AFM and SEM microscopes can be acquired at the same time, in the same place, and under the same conditions.

The scan head was designed to fit into most SEM systems. It is easy to mount and compatible with SEM accessories like FIB, GIS and EDX. The self-sensing probes do not require optical detection or a complicated adjustment of a laser.

Further System Benefits
  • Complex sample analysis: Simultaneous acquisition of data from SEM and AFM, and their seamless correlation into 3D images
  • In-situ conditions: All measurements are done at the same time, at the same place, and under the same conditions, no risk of sample contamination
  • Precise localization of the region of interest
  • Enhancement of SEM capabilities

Correlative Probe and Electron Microscopy, shortly CPEM, is technology combining Atomic Force Microscopy (AFM) with Scanning Electron Microscopy (SEM). It allows simultaneous detection and acquisition of signals from both instruments.

Application Areas

Successful applications of the LiteScope™ and CPEM have been made in the field of Material Science, Life Science, Semiconductors and Nanostructures.

  • Graphene on Silicon Carbide

  • LiNiO2 cathode powder

  • Protein nanowires

  • Surface study of pharma powder

  • Failure Analysis of a Bipolar Junction Transistor

  • Defect analysis of a CMOS-type chip

Complex and correlative sample analysis

Unique CPEM technology enables complex sample characterisation via in-time correlation of different AFM and SEM channels.

In-situ sample characterization

In-situ conditions inside the SEM ensure sample analysis at the same time, in the same place and under the same conditions.

Precise localization of the region of interest

Extremely precise and time saving approach uses SEM to navigate the AFM tip to the region of interest, enabling its fast & easy localization.

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