Litescope from Nenovision A unique AFM-in-SEM tool for multimodal in-situ correlative sample analysis

LiteScope

A unique AFM-in-SEM tool for multimodal in-situ correlative sample analysis

AFM-in-SEM

The Nenovision LiteScope™ is a compact Atomic Force Microscope designed for easy integration into Scanning Electron Microscopes.

Merging the strengths of AFM and SEM gives you the best of the two leading imaging techniques. It opens the door to completely new possibilities in the field of in-situ complex sample analysis. Successful applications have been a proof of the LiteScope™ in the fields of Material Science, Semiconductors, Life Science and Nanostructures.

CPEM which stands for Correlative Probe and Electron Microscopy allows the simultaneous detection and acquisition of signals from the LiteScope™ and the SEM. During scanning, the SEM electron beam points close to the AFM tip with a constant offset. They both remain static, while the sample is moving thanks to the LiteScope’s piezo scanner. This way, data from AFM and SEM microscopes can be acquired at the same time, in the same place, and under the same conditions.

The scan head was designed to fit into most SEM systems. It is easy to mount and compatible with SEM accessories like FIB, GIS and EDX. The self-sensing probes do not require optical detection or a complicated adjustment of a laser.

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Further System Benefits

Complex sample analysis: Simultaneous acquisition of data from SEM and AFM, and their seamless correlation into 3D images
In-situ conditions: All measurements are done at the same time, at the same place, and under the same conditions, no risk of sample contamination
Precise localization of the region of interest
Enhancement of SEM capabilities

CPEM

Correlative Probe and Electron Microscopy, shortly CPEM, is technology combining Atomic Force Microscopy (AFM) with Scanning Electron Microscopy (SEM). It allows simultaneous detection and acquisition of signals from both instruments.

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